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CLEAN ROOM
VENTILATION
AIR CONDITIONING UNIT
AIR
DRYER
OZONE
GENERATING
SYSTEM
BALANCE
BAROMETER
VALVE
O₃ GAS
COOLING
TOWER
TO SPRAYERS
AIR
BASIN
CORROSION
COUPON RACK
HEAT
EXCHANGER
10" PIPE
MAIN CIRCULATION
PUMP
2" PIPE
ISOLATING
VALVE V1
PUMP WITH
BASKET FILTER
INJECTOR
V2
OZONE
DIFFUSING
ELECTRODE
SAMPLING SPEED
CONTROL VALVE
SAMPLING
LINE